Title :
Towards silicon-compatible 2D and 3D photonic crystals
Author :
Ferrand, P. ; Jonsson, F. ; Seekamp, J. ; Soloviev, V. ; Romanov, S.G. ; Torres, C. M Sotomayor ; Ahopelto, J. ; Egen, M. ; Zentel, R.
Author_Institution :
Inst. of Mater. Sci., Wuppertal Univ., Germany
Abstract :
The realisation of photonic crystals on silicon platforms is presented with the aim to obtain waveguides and light emitting structures. We report on crystallisation on patterned substrates and defect engineering by direct electron-beam writing as examples of two approaches to fabricate and structure photonic crystals. The requirements to realise waveguides need crystallisation in confined environments.
Keywords :
crystallisation; electron beam lithography; light emitting devices; optical fabrication; optical waveguides; photonic crystals; Si; crystallisation; direct electron-beam writing; light emitting structures; silicon-compatible photonic crystals; waveguides;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
