Title :
Novel interferometric ellipsometer with wavelength-swept source
Author :
Watkins, Lionel R.
Author_Institution :
Dept. of Phys., Auckland Univ., New Zealand
Abstract :
A novel interferometric ellipsometer with no moving parts which uses a semiconductor laser diode as the source is described. Temporal fringes are produced by modulation of the bias current and unbalanced arms in the interferometer.
Keywords :
ellipsometry; light interferometry; optical modulation; semiconductor lasers; interferometric ellipsometer; semiconductor laser diode; temporal fringes; wavelength-swept source;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
