Title :
1.5-/spl mu/m-wavelength single mode semiconductor lasers with deeply etched vertical grating
Author :
Arai, S. ; Kim, H.-C. ; Kanjo, H.
Abstract :
Small periodic grating structures were dry-etched with superior vertically and high aspect ratio. These structures were then applied to demonstrate stable single mode and low threshold operation on high index contrast laser devices.
Keywords :
diffraction gratings; etching; laser modes; laser stability; laser transitions; semiconductor lasers; 1.5 mum; deeply etched vertical grating; dry etching; periodic grating structures; single mode semiconductor lasers; stable single mode;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
