Title :
A gigahertz silicon-on-insulator Mach-Zehnder modulator
Author :
Samara-Rubio, Dean ; Liao, Ling ; Liu, Ansheng ; Jones, Richard ; Paniccia, Mario ; Cohen, Oded ; Rubin, Doron
Author_Institution :
Intel Corp., Santa Clara, CA, USA
Abstract :
We report a modulator in which a polysilicon-oxide-silicon capacitor forms a ridge waveguide to achieve unprecedented performance in silicon: 2.5 GHz small-signal bandwidth and a driver-limited extinction ratio of 5 dB at 1 gigabit per second.
Keywords :
Mach-Zehnder interferometers; capacitors; elemental semiconductors; extinction coefficients; optical modulation; optical polymers; optical waveguides; ridge waveguides; silicon; silicon-on-insulator; 1 Gbit/s; 2.5 GHz; Mach-Zehnder modulator; Si; extinction ratio; polysilicon-oxide-silicon capacitor; ridge waveguide; silicon-on-insulator; small-signal bandwidth;
Conference_Titel :
Optical Fiber Communication Conference, 2004. OFC 2004
Conference_Location :
Los Angeles, CA, USA
Print_ISBN :
1-55752-772-5
