Title :
Dynamic optimization of dissipative PDEs using control vector parameterization: application to GaN thin film epitaxy
Author :
Armaou, Antonios ; Varshney, Amit
Author_Institution :
Dept. of Chem. Eng., Pennsylvania State Univ., University Park, PA, USA
fDate :
June 30 2004-July 2 2004
Abstract :
We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a metal-organic vapor-phase epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.
Keywords :
epitaxial growth; nonlinear equations; nonlinear systems; optimisation; partial differential equations; GaN thin film epitaxy; control vector parametrization-based schemes; dynamic constraint optimization problems; highly-dissipative nonlinear partial differential equations; metal-organic vapor-phase epitaxy process; nonlinear model reduction techniques; spatially-distributed processes;
Conference_Titel :
American Control Conference, 2004. Proceedings of the 2004
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-8335-4