DocumentCode
424587
Title
Dynamic optimization of dissipative PDEs using control vector parameterization: application to GaN thin film epitaxy
Author
Armaou, Antonios ; Varshney, Amit
Author_Institution
Dept. of Chem. Eng., Pennsylvania State Univ., University Park, PA, USA
Volume
1
fYear
2004
fDate
June 30 2004-July 2 2004
Firstpage
279
Abstract
We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a metal-organic vapor-phase epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.
Keywords
epitaxial growth; nonlinear equations; nonlinear systems; optimisation; partial differential equations; GaN thin film epitaxy; control vector parametrization-based schemes; dynamic constraint optimization problems; highly-dissipative nonlinear partial differential equations; metal-organic vapor-phase epitaxy process; nonlinear model reduction techniques; spatially-distributed processes;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 2004. Proceedings of the 2004
Conference_Location
Boston, MA, USA
ISSN
0743-1619
Print_ISBN
0-7803-8335-4
Type
conf
Filename
1383618
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