• DocumentCode
    424587
  • Title

    Dynamic optimization of dissipative PDEs using control vector parameterization: application to GaN thin film epitaxy

  • Author

    Armaou, Antonios ; Varshney, Amit

  • Author_Institution
    Dept. of Chem. Eng., Pennsylvania State Univ., University Park, PA, USA
  • Volume
    1
  • fYear
    2004
  • fDate
    June 30 2004-July 2 2004
  • Firstpage
    279
  • Abstract
    We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a metal-organic vapor-phase epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.
  • Keywords
    epitaxial growth; nonlinear equations; nonlinear systems; optimisation; partial differential equations; GaN thin film epitaxy; control vector parametrization-based schemes; dynamic constraint optimization problems; highly-dissipative nonlinear partial differential equations; metal-organic vapor-phase epitaxy process; nonlinear model reduction techniques; spatially-distributed processes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    American Control Conference, 2004. Proceedings of the 2004
  • Conference_Location
    Boston, MA, USA
  • ISSN
    0743-1619
  • Print_ISBN
    0-7803-8335-4
  • Type

    conf

  • Filename
    1383618