Modified sliding mode control and its application to electrostatically controlled dual-axis micromirrors

We demonstrate the application of a modified sliding mode control (SMC) scheme with time-constant switching for MEMS micromirror control. This scheme yields substantial performance improvement over previous work, without increasing in implementation complexity. The modification implements a discrete first-order sliding function with a switching time constant and provides the same level of robustness with an added benefit of reduced steady-state error. A two-axis gimbaled MEMS micromirror array designed at Corning-IntelliSense is used for experimental demonstration.