Title :
A digital feedback damping scheme for a micromachined directional microphone
Author :
Wu, N. Eva ; Miles, Ronald N. ; Aydin, Oguz A.
Author_Institution :
Dept. of Electr. & Comput. Eng., State Univ. of New York, Binghamton, NY, USA
fDate :
June 30 2004-July 2 2004
Abstract :
In this paper, a method for introducing active damping for a diaphragm in a micromachined directional microphone is considered. The sigma-delta modulation is used to circumvent the nonlinearity of the capacitive transducers of the microphone. The principle of operation of the damping scheme is explained, and the simulation results of a lumped diaphragm model are presented.
Keywords :
capacitive sensors; control system synthesis; damping; diaphragms; digital control; feedback; micromachining; microphones; sigma-delta modulation; active diaphragm damping; capacitive transducers; control system synthesis; digital feedback damping scheme; lumped diaphragm model; micromachined directional microphone; sigma-delta modulation;
Conference_Titel :
American Control Conference, 2004. Proceedings of the 2004
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-8335-4
