DocumentCode
425088
Title
A digital feedback damping scheme for a micromachined directional microphone
Author
Wu, N. Eva ; Miles, Ronald N. ; Aydin, Oguz A.
Author_Institution
Dept. of Electr. & Comput. Eng., State Univ. of New York, Binghamton, NY, USA
Volume
4
fYear
2004
fDate
June 30 2004-July 2 2004
Firstpage
3315
Abstract
In this paper, a method for introducing active damping for a diaphragm in a micromachined directional microphone is considered. The sigma-delta modulation is used to circumvent the nonlinearity of the capacitive transducers of the microphone. The principle of operation of the damping scheme is explained, and the simulation results of a lumped diaphragm model are presented.
Keywords
capacitive sensors; control system synthesis; damping; diaphragms; digital control; feedback; micromachining; microphones; sigma-delta modulation; active diaphragm damping; capacitive transducers; control system synthesis; digital feedback damping scheme; lumped diaphragm model; micromachined directional microphone; sigma-delta modulation;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 2004. Proceedings of the 2004
Conference_Location
Boston, MA, USA
ISSN
0743-1619
Print_ISBN
0-7803-8335-4
Type
conf
Filename
1384420
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