MEMS Torsion Oscillator Magnetic Field Sensor

Author

Xiaolu Yin ; Qianqian Jiao ; Lu Yuan ; Sy-Hwang Liou

Author_Institution

Dept. of Phys. & Astron, Univ. of Nebraska, Lincoln, NE, USA

Volume

49

Issue

7

fYear

2013

fDate

Jul-13

Firstpage

3890

Lastpage

3892

Abstract

We developed a new sensitive microcantilever torque magnetometer-based magnetic field sensor that can detect magnetic field changes of a few nano-Tesla under ambient conditions. This sensor consists of a torsion oscillator, fabricated by a microelectromechanical systems (MEMS) process, and a soft magnetic Fe_77.5Si_7.5B₁₅ wire. This paper describes the principle and details of the experimental set-up and demonstrates that the sensitivity can be further improved by modifying the spring constant of the cantilever.

Keywords

boron alloys; cantilevers; iron alloys; magnetic field measurement; magnetic sensors; magnetometers; microsensors; oscillators; silicon alloys; Fe_77.5Si_7.5B₁₅; MEMS torsion oscillator magnetic field sensor; cantilever; magnetic field detection; microelectromechanical system process; nanoTesla; sensitive microcantilever torque magnetometer-based magnetic field sensor; Magnetic hysteresis; Magnetic resonance; Magnetometers; Micromechanical devices; Sensitivity; Soft magnetic materials; Torque; MEMS; Magnetic field sensor; torsion oscillator;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2013.2252153

Filename

6559313