Title :
Microwave plasmochemical deposition of the planar waveguide structures on the base of silica glass
Author :
Grigorjantz, V.V. ; Kochmarev, L.Yu. ; Shilov, P.I.
Author_Institution :
Inst. of Radioengineering & Electron., Russian Acad. of Sci., Frjasino, Russia
Abstract :
Planar optical waveguides (POW) on silicon and silica substrates have applications for integrated sensors, optical communications and MOEMS-technologies. Quartz-quartz planar waveguides with fluorine cladding and pure silica glass core were produced by the microwave plasmochemical deposition method at low pressure.
Keywords :
fluorine compounds; glass; optical planar waveguides; plasma deposition; quartz; fluorine cladding; low pressure deposition method; microwave plasmochemical deposition; planar optical waveguides; pure silica glass core; quartz-quartz planar waveguides; silica substrates; silicon; Electromagnetic heating; Glass; Optical planar waveguides; Optical refraction; Optical resonators; Optical sensors; Optical variables control; Optical waveguides; Planar waveguides; Silicon compounds;
Conference_Titel :
Microwave and Telecommunication Technology, 2004. CriMico 2004. 2004 14th International Crimean Conference on
Print_ISBN :
966-7968-69-3
DOI :
10.1109/CRMICO.2004.183326
