DocumentCode :
426395
Title :
Peculiarities of microwave plasma forming conditions at low vacuum in plasmatron with rectangular form resonator
Author :
Bordusov, S.V.
Author_Institution :
Byelorussian State Univ. of Informatics & Radioelectron., Minsk, Belarus
fYear :
2004
fDate :
13-17 Sept. 2004
Firstpage :
584
Lastpage :
585
Abstract :
The results are presented of measuring a series of electrophysical characteristics determining the operation of a microwave plasma generator based on a rectangular resonator with partial filling of the resonating volume with plasma. It was established that the allocation of a microwave field and local electrical plasma, with conductivity according to the length of the discharge area, carries a periodic character with alternating maxima and minima. The changes of temperature values have a rather smooth shape with a small rise near the place of microwave energy input to the resonator. Because of a space inhomogeneity in the parameters of the microwave discharge, plasma generators of a given type at microwave power density values of up to 7.104 W/m3 brought to the discharge are reasonable to use for non-precision plasma processes such as interoperating processes for activation of the substrate surfaces of integrated circuits, cleaning off lacquers and polish, plasma-chemical removal of photoresistant film coats, etc.
Keywords :
cavity resonators; plasma applications; plasma diodes; plasma production; local electrical plasma; low vacuum; microwave discharge; microwave field; microwave plasma forming conditions; periodic character; plasmatron; rectangular resonator; Character generation; Conductivity; Filling; Microwave generation; Microwave measurements; Plasma density; Plasma measurements; Plasma properties; Plasma temperature; Volume measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave and Telecommunication Technology, 2004. CriMico 2004. 2004 14th International Crimean Conference on
Print_ISBN :
966-7968-69-3
Type :
conf
DOI :
10.1109/CRMICO.2004.183347
Filename :
1390329
Link To Document :
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