A high-performance dipole surface drive for large travel and force

Author

Hoen, S. ; Bai, Q. ; Harley, J.A. ; Horsley, D.A. ; Matta, F. ; Verhoeven, T. ; Williams, J. ; Williams, K.R.

Author_Institution

Agilent Lab., Palo Alto, CA, USA

Volume

1

fYear

2003

fDate

8-12 June 2003

Firstpage

344

Abstract

We report unparalleled travel, force, precision and repeatability with an electrostatically actuated dipole surface drive. We have successfully demonstrated motors that generate several hundred micronewtons while traveling 50 microns at 60 V. Without external feedback control, the motors can be positioned with nanometer resolution and repeatability. The manufacture of these motors uses a two-level polysilicon deposition, a wafer bond and two anisotropic deep silicon etches.

Keywords

electrostatic actuators; elemental semiconductors; etching; motor drives; semiconductor device models; silicon; stepping motors; wafer bonding; 50 V; 50 micron; Si; dipole surface drive; electrostatically actuated dipole surface; nanometer resolution; stepping motors; two anisotropic deep silicon etches; two-level polysilicon deposition; wafer bond; Actuators; Electrodes; Electrostatics; Manufacturing; Micromotors; Mirrors; Optical microscopy; Probes; Stators; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1395506

Filename

1395506