Micromachined low actuation voltage RF MEMS capacitive switches, technology and characterization

Author

Rangra, K.J. ; Marcelli, R. ; Soncini, G. ; Giacomozzi, F. ; Margesin, B. ; Lorenzelli, L. ; Mulloni, V. ; Collini, C.

Author_Institution

DIT, Trento Univ., Povo, Italy

Volume

1

fYear

2004

fDate

4-6 Oct. 2004

Lastpage

168

Abstract

In this paper we report the realization and characterization of low-loss, capacitive RF MEMS switches that utilize folded serpentine spring suspensions with large area actuation electrodes. The surface micromachined switches with 1.7 μm thick electroplated gold beams are implemented in standard 50 ohm CPW configuration. The electromechanical characterization indicates the measured actuation voltages in the range of 8 - 15 volts. The RF measurements of devices give insertion loss of 0.24 dB and isolation better than 21 dB at 20 GHz.

Keywords

low-power electronics; micromachining; microswitches; springs (mechanical); 0.17 micron; 0.24 dB; 20 GHz; 50 ohms; 8 to 15 V; CPW configuration; MEMS switches; capacitive switches; electromechanical characterization; electroplated gold beams; folded serpentine spring suspensions; large area actuation electrodes; low actuation voltage RF MEMS; micromachined RF MEMS; surface micromachined switches with; Coplanar waveguides; Electrodes; Gold; Loss measurement; Low voltage; Radio frequency; Radiofrequency microelectromechanical systems; Springs; Suspensions; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International

Print_ISBN

0-7803-8499-7

Type

conf

DOI

10.1109/SMICND.2004.1402830

Filename

1402830