Title :
MEMS switches: design and manufacturing
Author :
Vasilache, D. ; Tibeica, C. ; Moagar, V. ; Enachescu, R. ; Iordache, T. ; Vladoianu, F. ; Podaru, C. ; Manea, E. ; Muller, A.
Author_Institution :
National Inst. for R&D in Microtechnologies, Bucharest, Romania
Abstract :
The aim of this paper is to present first MEMS switch structures designed and manufactured in IMT. Switch structures with different length were designed, manufactured and measured. Comparisons between simulated and measured results are also presented.
Keywords :
microswitches; IMT; MEMS switches; switch structures; Biomembranes; Bridge circuits; Electrodes; Gold; Manufacturing; Microswitches; Resists; Switches; Transmission line measurements; Voltage;
Conference_Titel :
Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International
Print_ISBN :
0-7803-8499-7
DOI :
10.1109/SMICND.2004.1402831
