Title :
Comparison of microheaters efficiency for sensing applications
Author :
Cobianu, Oana Mihaela ; Cobianu, Cornel
Author_Institution :
Dept. of Electron. & Telecommun. Sci., Politechnica Univ. of Bucharest, Romania
Abstract :
This paper is concerned with the theoretical comparison of the heat transfer mechanisms through the heated microbridges made from different materials: polysilicon and platinum. The results are used for the evaluation of the different possible solutions for microheaters in surface micromachined MEMS sensors.
Keywords :
heat transfer; micromachining; microsensors; platinum; silicon; MEMS sensors; heat transfer mechanisms; heated microbridges; microheaters; platinum; polysilicon; surface micromachining; Analytical models; Biomembranes; Bridges; Conductivity; Current; Heat transfer; Mathematical model; Platinum; Resistance heating; Temperature;
Conference_Titel :
Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International
Print_ISBN :
0-7803-8499-7
DOI :
10.1109/SMICND.2004.1402863
