A V-band single-stub RF MEMS impedance tuner

A V-Band reconfigurable single-stub impedance tuner has been developed which is suitable to be integrated inside an RF probe. The tuner has 10 RF MEMS switched capacitors producing 1024 (2¹⁰ different impedances. The tuner is the first published integrated VBand impedance tuner having good impedance coverage for the whole 50 to 75 GHz frequency range with a measured of IMax = 0.90 at 60 GHz. Measurement results verifying the tuner performance are presented.