Title :
A new approach to RF thin film microinductors
Author :
Froramberger, M. ; Tewes, M. ; McCord, J. ; Hartung, W. ; Loschand, R. ; Quandt, E.
Abstract :
A new approach to RF thin film inductors has been investigated. A toroid inductor design was realized in thin film technology. An operating frequency in the range from 100MHz to 3 GHz was targeted. Softmagnetic FeCoBSi was used as cure material. The magnetic film were sputter deposited in a multilayer way to realize a crossed magnetic anisotropy in the core. High frequency measurements illustrate the advantages of the unique magnetic geometry. The influence and benefits of such a magnetic core on microinductors will he discused in detail. The results show, that such crossed anisotropy microinductors are very promising alternative to common planar spiral inductors in the RF range.
Keywords :
Inductors; Magnetic anisotropy; Magnetic cores; Magnetic flux; Magnetic materials; Perpendicular magnetic anisotropy; Q factor; Radio frequency; Toroidal magnetic fields; Transistors;
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0
