DocumentCode
430330
Title
A new approach to RF thin film microinductors
Author
Froramberger, M. ; Tewes, M. ; McCord, J. ; Hartung, W. ; Loschand, R. ; Quandt, E.
Volume
3
fYear
2004
fDate
12-14 Oct. 2004
Firstpage
1361
Lastpage
1364
Abstract
A new approach to RF thin film inductors has been investigated. A toroid inductor design was realized in thin film technology. An operating frequency in the range from 100MHz to 3 GHz was targeted. Softmagnetic FeCoBSi was used as cure material. The magnetic film were sputter deposited in a multilayer way to realize a crossed magnetic anisotropy in the core. High frequency measurements illustrate the advantages of the unique magnetic geometry. The influence and benefits of such a magnetic core on microinductors will he discused in detail. The results show, that such crossed anisotropy microinductors are very promising alternative to common planar spiral inductors in the RF range.
Keywords
Inductors; Magnetic anisotropy; Magnetic cores; Magnetic flux; Magnetic materials; Perpendicular magnetic anisotropy; Q factor; Radio frequency; Toroidal magnetic fields; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2004. 34th European
Conference_Location
Amsterdam, The Netherlands
Print_ISBN
1-58053-992-0
Type
conf
Filename
1411267
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