• DocumentCode
    430345
  • Title

    Low cost RF MEMS switches using LCP substrate

  • Author

    Guoan Wang ; Thompson, D. ; Tentzeris, E.M. ; Papapolymerou, J.

  • Volume
    3
  • fYear
    2004
  • fDate
    12-14 Oct. 2004
  • Firstpage
    1441
  • Lastpage
    1444
  • Abstract
    In this paper, we present an RF MEMS switch developed on a low cost, flexible liquid crystal polymer (LCP) substrate. LCP´s very low water absorption (0.04%), low dielectric loss and multi-layer circuit capability make it very appealing for RF systems-on-a-package (SOP). Here we present for the first time capacitive MEMS switch fabrication on an LCP substrate and its characterization and properties up to 40 GHZ.
  • Keywords
    Coplanar waveguides; Costs; Dielectric substrates; Liquid crystal polymers; Microswitches; Power semiconductor switches; Radio frequency; Radiofrequency microelectromechanical systems; Rough surfaces; Surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2004. 34th European
  • Conference_Location
    Amsterdam, The Netherlands
  • Print_ISBN
    1-58053-992-0
  • Type

    conf

  • Filename
    1411290
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=430345