Title :
Low cost RF MEMS switches using LCP substrate
Author :
Guoan Wang ; Thompson, D. ; Tentzeris, E.M. ; Papapolymerou, J.
Abstract :
In this paper, we present an RF MEMS switch developed on a low cost, flexible liquid crystal polymer (LCP) substrate. LCP´s very low water absorption (0.04%), low dielectric loss and multi-layer circuit capability make it very appealing for RF systems-on-a-package (SOP). Here we present for the first time capacitive MEMS switch fabrication on an LCP substrate and its characterization and properties up to 40 GHZ.
Keywords :
Coplanar waveguides; Costs; Dielectric substrates; Liquid crystal polymers; Microswitches; Power semiconductor switches; Radio frequency; Radiofrequency microelectromechanical systems; Rough surfaces; Surface roughness;
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0
