Title :
RF MEMS sensitivity to radiations
Author :
Papaioannou, G.J. ; Theonas, V. ; Exarchos, M. ; Konstantinidis, G.
Keywords :
Accelerometers; Dielectrics; Electrostatics; Insulation; Ionizing radiation; Micromechanical devices; Physics; Radiofrequency microelectromechanical systems; Scanning electron microscopy; Space technology;
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0