DocumentCode
430514
Title
RF MEMS sensitivity to radiations
Author
Papaioannou, G.J. ; Theonas, V. ; Exarchos, M. ; Konstantinidis, G.
Volume
1
fYear
2004
fDate
14-14 Oct. 2004
Firstpage
65
Lastpage
68
Keywords
Accelerometers; Dielectrics; Electrostatics; Insulation; Ionizing radiation; Micromechanical devices; Physics; Radiofrequency microelectromechanical systems; Scanning electron microscopy; Space technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2004. 34th European
Conference_Location
Amsterdam, The Netherlands
Print_ISBN
1-58053-992-0
Type
conf
Filename
1412517
Link To Document