DocumentCode :
430514
Title :
RF MEMS sensitivity to radiations
Author :
Papaioannou, G.J. ; Theonas, V. ; Exarchos, M. ; Konstantinidis, G.
Volume :
1
fYear :
2004
fDate :
14-14 Oct. 2004
Firstpage :
65
Lastpage :
68
Keywords :
Accelerometers; Dielectrics; Electrostatics; Insulation; Ionizing radiation; Micromechanical devices; Physics; Radiofrequency microelectromechanical systems; Scanning electron microscopy; Space technology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0
Type :
conf
Filename :
1412517
Link To Document :
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