Title : 
RF MEMS sensitivity to radiations
         
        
            Author : 
Papaioannou, G.J. ; Theonas, V. ; Exarchos, M. ; Konstantinidis, G.
         
        
        
        
        
        
        
            Keywords : 
Accelerometers; Dielectrics; Electrostatics; Insulation; Ionizing radiation; Micromechanical devices; Physics; Radiofrequency microelectromechanical systems; Scanning electron microscopy; Space technology;
         
        
        
        
            Conference_Titel : 
Microwave Conference, 2004. 34th European
         
        
            Conference_Location : 
Amsterdam, The Netherlands
         
        
            Print_ISBN : 
1-58053-992-0