Title :
An original methodology to assess fatigue behavior in RF MEMS devices
Author :
Millet, O. ; Bertrand, P. ; Legrand, B. ; Collard, D. ; Buchaillot, Lionel
Keywords :
Fabrication; Fatigue; Gold; Performance evaluation; Predictive models; Radiofrequency microelectromechanical systems; Stability; Stress; Switches; Testing;
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0
