Title :
Design of silicon-pTMDS bio-MEMS with millimeter and sub-millimeter waves transducers
Author :
Mille, V. ; Bourzgui, N.-E. ; Medjdoub, F. ; Bocquet, B.
Keywords :
Biosensors; Chemical technology; Fabrication; Food technology; Microelectronics; Microfluidics; Millimeter wave technology; Polymers; Silicon; Transducers;
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0