DocumentCode :
430539
Title :
Design of silicon-pTMDS bio-MEMS with millimeter and sub-millimeter waves transducers
Author :
Mille, V. ; Bourzgui, N.-E. ; Medjdoub, F. ; Bocquet, B.
Volume :
1
fYear :
2004
fDate :
14-14 Oct. 2004
Firstpage :
169
Lastpage :
172
Keywords :
Biosensors; Chemical technology; Fabrication; Food technology; Microelectronics; Microfluidics; Millimeter wave technology; Polymers; Silicon; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0
Type :
conf
Filename :
1412544
Link To Document :
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