DocumentCode
430539
Title
Design of silicon-pTMDS bio-MEMS with millimeter and sub-millimeter waves transducers
Author
Mille, V. ; Bourzgui, N.-E. ; Medjdoub, F. ; Bocquet, B.
Volume
1
fYear
2004
fDate
14-14 Oct. 2004
Firstpage
169
Lastpage
172
Keywords
Biosensors; Chemical technology; Fabrication; Food technology; Microelectronics; Microfluidics; Millimeter wave technology; Polymers; Silicon; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2004. 34th European
Conference_Location
Amsterdam, The Netherlands
Print_ISBN
1-58053-992-0
Type
conf
Filename
1412544
Link To Document