Title :
Pulsed Hertzian dipole radiation and electrostatic discharge events in manufacturing
Author :
Maloney, Timothy J.
Author_Institution :
Intel Corp., Santa Clara, CA, USA
Abstract :
A destructive Charged Device Model electrostatic discharge event can happen in semiconductor manufacturing and should be detectable from radiation that results from collapse of an electric dipole. The analytically describable radiation field pulse of CDM can be readily produced with a new instrument that creates dipole collapse at will. A coaxial monopole E-field antenna\´s transfer function gives the antenna signal in near-field, and experiments compare well with theory. A major feature of the antenna response to this field pulse is a bipolar "monocycle" pulse. A transmission linebased synthetic monocycle pulser, for characterizing antenna-driven ESD detectors, can be built and is described.
Keywords :
electrostatic discharge; monopole antennas; semiconductor industry; transfer functions; CDM; antenna signal; antenna-driven ESD detector; bipolar monocycle pulse; coaxial monopole E-field antenna transfer function; electric dipole; electrostatic discharge event; pulsed Hertzian dipole radiation; radiation field pulse; semiconductor manufacturing; transmission linebased synthetic monocycle pulser; Antenna measurements; Current measurement; Detectors; Dipole antennas; Discharges (electric); Electrostatic discharges; Manufacturing processes;
Journal_Title :
Electromagnetic Compatibility Magazine, IEEE
DOI :
10.1109/MEMC.2013.6623294