DocumentCode
432042
Title
A new and simple concept for self-aligned hybrid integration in silicon on insulator (SOI)
Author
Mitze, T. ; Schnarrenberger, M. ; Zimmermann, L. ; Bruns, J. ; Fidorra, F. ; Kreissl, J. ; Janiak, K. ; Heidrich, H. ; Petermann, K.
Author_Institution
Institut fur Hochfrequenz- und Halbleiter-Systemtechnologien, Technische Univ. Berlin, Germany
fYear
2004
fDate
29 Sept.-1 Oct. 2004
Firstpage
162
Lastpage
164
Abstract
A concept for a SOI motherboard is introduced. AuSn solder technology is used for hybrid integration. The device adjustment on the board is realised by passive self-alignment. First results on fabricated boards are very encouraging.
Keywords
integrated optoelectronics; silicon-on-insulator; soldering; AuSn; AuSn solder technology; SOI motherboard; self-aligned hybrid integration; silicon on insulator; Etching; High speed optical techniques; Integrated optics; Optical devices; Optical filters; Optical materials; Optical receivers; Optical transmitters; Optical waveguides; Silicon on insulator technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics, 2004. First IEEE International Conference on
Print_ISBN
0-7803-8474-1
Type
conf
DOI
10.1109/GROUP4.2004.1416719
Filename
1416719
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