DocumentCode :
432087
Title :
Study of layered SAW devices operating at different modes for gas sensing applications
Author :
Kalantar-zadeh, Kourosh ; Powell, David A. ; Ippolito, Samuel ; Wlodarski, Wojtek
Author_Institution :
Sch. of Electr. & Comput. Eng., R. Melbourne Inst. of Technol., Vic., Australia
Volume :
1
fYear :
2004
fDate :
23-27 Aug. 2004
Firstpage :
191
Abstract :
In this paper, the behaviour of different propagation modes in layered ZnO/XZ LiNbO3 surface acoustic wave (SAW) devices is investigated both theoretically and experimentally. Propagation properties of the structures are theoretically investigated using the multilayered spectral Green´s function. The gas-sensing performance of these transducers for different ZnO layer thicknesses is observed. Additionally, the gas-sensing behaviour of different propagating modes is presented.
Keywords :
Green´s function methods; gas sensors; lithium compounds; surface acoustic wave sensors; ultrasonic propagation; zinc compounds; ZnO-LiNbO3; gas sensing; layer thickness effects; layered SAW devices; multilayered spectral Green´s function; propagation modes; Acoustic propagation; Acoustic waves; Conductive films; Conductivity; Gas detectors; Permittivity; Substrates; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-8412-1
Type :
conf
DOI :
10.1109/ULTSYM.2004.1417699
Filename :
1417699
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=432087
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