Title :
A simple distributed model for cMUT [micromachined capacitive ultrasonic transducers]
Author :
Patat, Frédéric ; Teston, Franck ; Felix, Nicolas ; Certon, Dominique
Author_Institution :
Lab. Ultrasons Signaux et Instrum., GIP Ultrasons, Tours, France
Abstract :
A simple distributed model is presented and compared with an FEM model. A good agreement is observed for collapse voltage and resonance frequency values. "Master curves" to aid cMUT design, such as normalized capacitance and coupling factor, are defined as a function of normalized bias voltage. Next, the cMUT dynamic behavior is investigated through its electrical impedance and comparison is made with measurements.
Keywords :
acoustic resonance; capacitive sensors; dynamic response; finite difference methods; microactuators; microsensors; ultrasonic transducers; FEM; cMUT distributed model; collapse voltage; coupling factor; electrical impedance dynamic behavior; finite difference model; micromachined capacitive transducers; normalized bias voltage dependent functions; normalized capacitance; resonance frequency; Biomembranes; Design engineering; Electrodes; Equations; Instruments; Mechanical factors; Resonance; Testing; Transducers; Voltage;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1417713
