DocumentCode
432097
Title
A simple distributed model for cMUT [micromachined capacitive ultrasonic transducers]
Author
Patat, Frédéric ; Teston, Franck ; Felix, Nicolas ; Certon, Dominique
Author_Institution
Lab. Ultrasons Signaux et Instrum., GIP Ultrasons, Tours, France
Volume
1
fYear
2004
fDate
23-27 Aug. 2004
Firstpage
248
Abstract
A simple distributed model is presented and compared with an FEM model. A good agreement is observed for collapse voltage and resonance frequency values. "Master curves" to aid cMUT design, such as normalized capacitance and coupling factor, are defined as a function of normalized bias voltage. Next, the cMUT dynamic behavior is investigated through its electrical impedance and comparison is made with measurements.
Keywords
acoustic resonance; capacitive sensors; dynamic response; finite difference methods; microactuators; microsensors; ultrasonic transducers; FEM; cMUT distributed model; collapse voltage; coupling factor; electrical impedance dynamic behavior; finite difference model; micromachined capacitive transducers; normalized bias voltage dependent functions; normalized capacitance; resonance frequency; Biomembranes; Design engineering; Electrodes; Equations; Instruments; Mechanical factors; Resonance; Testing; Transducers; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2004 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-8412-1
Type
conf
DOI
10.1109/ULTSYM.2004.1417713
Filename
1417713
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