Title :
A cMUT linear array used as echographic probe: fabrication, characterization, and images
Author :
Caliano, G. ; Carotenuto, R. ; Cianci, E. ; Foglietti, V. ; Caronti, A. ; Pappalardo, M.
Author_Institution :
Dipt. di Ingegneria Elettronica, Universita Roma Tre, Italy
Abstract :
We report the design, the fabrication process, and the characterization of a 64-element ultrasonic transducer array based on the electrostatic effect and realized by silicon micromachined technology. These new devices are usually called capacitive micromachined ultrasonic transducers (cMUT). Using this transducer, we developed a probe for application in medical imaging. The probe was used in conjunction with a commercial echographic system to obtain images of echographic phantoms and of in vivo human body. Good echographic images of a test object and of internal organs of the human body were obtained, demonstrating the practical possibility to use the developed technology to make cMUT echographic probes.
Keywords :
biomedical ultrasonics; capacitive sensors; medical image processing; micromachining; microsensors; silicon; ultrasonic transducer arrays; Si; cMUT array; capacitive micromachined ultrasonic transducer array; echographic phantoms; echographic probe; electrostatic effect; fabrication process; in vivo human body; medical imaging; silicon micromachined technology; Biomedical imaging; Biomedical transducers; Electrostatics; Fabrication; Humans; Probes; Process design; Silicon; Ultrasonic transducer arrays; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1417746