Wide frequency band and high intensity thickness vibration of hydrothermal lead zirconate titanate polycrystalline film

A wide frequency band from 1 to 20 MHz ultrasonic transducer was fabricated by hydrothermal deposition technique of lead zirconate titanate (PZT) polycrystalline thick film. The PZT thick film of 45 μm was deposited on a 12 mm × 12 mm × 50 μm Ti substrate. An electrode of 8 mm × 8 mm was deposited on the PZT film. Wave generation of the transducer was demonstrated by experiments in water. From a single pulse excitation measurement, transmission ultrasound generated was from 1 to 20 MHz within 20 dB deviation. Sound pressure level of the radiated ultrasound was 61 kPa at 19.6 MHz. A harmonic driving using 2 MHz rectangular wave signal produced a wave which included odd order harmonic components from 3^rd to 11th harmonics.