Title :
NSPUDT structures with inclined reflectors on langasite
Author :
Zhgoon, Sergei ; Shvetsov, Alexander ; Sakharov, S. ; Semenov, Vadim
Author_Institution :
Moscow Power Eng. Inst., Russia
Abstract :
The paper deals with experimental measurements of the reflection in inclined reflecting arrays (RA) of thin-film strips, made with different metals on langasite yxlt/48.5°/26.6°. We have studied the reflection in inclined arrays from ordinary aluminum coatings in comparison to speed reducing coatings such as Au/Ti, Ni/Cu/Ti, Al/W and speed increasing coatings such as Al/Mg-alloy in combination with transducers. Properties of transducers made with such materials are also discussed.
Keywords :
acoustic wave reflection; aluminium; copper; electron device testing; gold; magnesium alloys; metallic thin films; nickel; surface acoustic wave transducers; titanium; tungsten; ultrasonic transducers; Al-W; Al/Mg-alloy speed increasing coatings; Al/W speed reducing coatings; Au-Ti; Au/Ti speed reducing coatings; La3Ga5SiO14; NSPUDT structures; Ni-Cu-Ti; Ni/Cu/Ti speed reducing coatings; aluminum coatings; inclined reflecting arrays; inclined reflectors; langasite; metal on langasite thin-film strips; natural single phase unidirectional transducers; reflection; transducer materials; Acoustic testing; Acoustic transducers; Aluminum; Coatings; Electrodes; Gold; Metallization; Reflection; Substrates; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1418220
