Ammonia sensing probe using shear horizontal surface acoustic wave technique

Author

Shen, Chi-Yen ; Huang, Chun-Pu ; Hsu, Kuo-Chien ; Jeng, Jin-Shing ; Chung, Mei-hui

Author_Institution

Dept. of Electr. Eng., I-Shou Univ., Kaohsiung, Taiwan

fYear

2004

fDate

23-27 Aug. 2004

Firstpage

546

Lastpage

548

Abstract

This study investigated an improved shear horizontal surface acoustic wave (SH-SAW) ammonia sensor based on L-glutamic acid hydrochloride. In order to satisfy Barkhausen criteria for oscillation and avoid mode hopping, it used coupling of modes (COM) theory to design a SH-SAW resonator. This SH-SAW sensor presented excellent reversibility, sensitivity, and repeatability when ammonia was in the ppb level. According to the signal-to-noise ratio of two, the estimated limit of detection (LOD) is 13.53 ppb.

Keywords

ammonia; gas sensors; sensitivity; surface acoustic wave resonators; surface acoustic wave sensors; Barkhausen criteria; L-glutamic acid hydrochloride; NH₃; SAW resonator; SAW sensor; ammonia sensing probe; coupling of modes theory; limit of detection; mode hopping; repeatability; reversibility; sensitivity; shear horizontal surface acoustic wave technique; signal-to-noise ratio; Acoustic waves; Biosensors; Ceramics; Chemical sensors; Coatings; Frequency; Polymer films; Probes; Surface acoustic waves; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and Exposition, 2004. Proceedings of the 2004 IEEE International

ISSN

1075-6787

Print_ISBN

0-7803-8414-8

Type

conf

DOI

10.1109/FREQ.2004.1418516

Filename

1418516