Title :
Microwave characterization of ferroelectric ceramic films
Author :
Deleniv, A. ; Gevorgian, S. ; Jantunnen, H. ; Hu, T.
Abstract :
A reflection type resonance method for microwave characterization of high permittivity ceramic films on dielectric substrates is proposed and demonstrated experimentally. The effect of the air gap on the measurement accuracy for an E-plane loaded sample is analyzed using HFSS. The method is used for microwave characterization of LTCC ferroelectric ceramic films on alumina substrate at X-hand frequencies. The measurement error of the dielectric permittivity is less than 5%.
Keywords :
Ceramics; Dielectric constant; Dielectric measurements; Dielectric substrates; Ferroelectric films; Ferroelectric materials; Frequency measurement; Loaded waveguides; Permittivity measurement; Resonance;
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0
