DocumentCode
432599
Title
MEMS tunable planar inductors using DC-contact switches
Author
Balachandran, S. ; Lakshminarayanan, B. ; Weller, T. ; Smith
Volume
2
fYear
2004
fDate
12-14 Oct. 2004
Firstpage
713
Lastpage
716
Abstract
This paper presents a tunable MEMS inductor that is designed to operate from 5-30GHz on a 500μm thick quartz substrate. Series cantilever beams that are DC-contact type switches are used to achieve a tuning ratio of 1.7. Experimental results for a 600pm long inductor show tuning from 0.56nH to 0.34nH at 25GHz The devices are intended for use as tuning elements at high microwave or nun-waver frequencies in circuits such as true time delay phase shifters.
Keywords
Circuit optimization; Conductors; Impedance; Inductance; Inductors; Micromechanical devices; Phase shifters; Structural beams; Switches; Tunable circuits and devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2004. 34th European
Conference_Location
Amsterdam, The Netherlands
Print_ISBN
1-58053-992-0
Type
conf
Filename
1418917
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