Title :
MEMS tunable planar inductors using DC-contact switches
Author :
Balachandran, S. ; Lakshminarayanan, B. ; Weller, T. ; Smith
Abstract :
This paper presents a tunable MEMS inductor that is designed to operate from 5-30GHz on a 500μm thick quartz substrate. Series cantilever beams that are DC-contact type switches are used to achieve a tuning ratio of 1.7. Experimental results for a 600pm long inductor show tuning from 0.56nH to 0.34nH at 25GHz The devices are intended for use as tuning elements at high microwave or nun-waver frequencies in circuits such as true time delay phase shifters.
Keywords :
Circuit optimization; Conductors; Impedance; Inductance; Inductors; Micromechanical devices; Phase shifters; Structural beams; Switches; Tunable circuits and devices;
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0
