Title :
Surface emitting quantum cascade lasers
Author :
Pflügl, C. ; Golka, S. ; Austerer, M. ; Schrenk, W. ; Andrews, A.M. ; Strasser, G.
Author_Institution :
Zentrum fur mikro- und Nanostrukturen, Technische Univ. Wien, Vienna, Austria
fDate :
27 Sept.-1 Oct. 2004
Abstract :
We present single mode surface emitting quantum cascade lasers (QCLs). Efficient surface emission of QCLs is obtained by a second-order surface grating. More complicated structures, e.g. photonic crystals, require very high aspect ratio dry etching. We provide a short overview of chlorine based plasma etching and discuss the limitations on accuracy and the impact of different process parameters on etch profiles and depths.
Keywords :
Bragg gratings; III-V semiconductors; aluminium compounds; distributed feedback lasers; gallium arsenide; photonic crystals; quantum cascade lasers; sputter etching; surface emitting lasers; GaAs; GaAs-AlGaAs; chlorine based plasma etching; dry etching; photonic crystals; second order surface grating; single mode surface emission; surface emitting quantum cascade lasers; Distributed feedback devices; Etching; Gratings; Laser feedback; Laser modes; Photonic crystals; Quantum cascade lasers; Surface emitting lasers; Vertical cavity surface emitting lasers; Waveguide lasers;
Conference_Titel :
Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the 2004 Joint 29th International Conference on
Print_ISBN :
0-7803-8490-3
DOI :
10.1109/ICIMW.2004.1422001
