Title :
Design and fabrication of a novel room temperature terahertz detection array
Author :
Adam, A.J.L. ; Klaassen, T.O. ; Hovenier, J.N. ; Sarro, P.M.
Author_Institution :
Fac. of Appl. Sci., Delft Univ. of Technol., Netherlands
fDate :
27 Sept.-1 Oct. 2004
Abstract :
We have designed a room temperature terahertz detector array using a thin film THz absorber on a silicon nitride membrane and a thermopile temperature read-out. The design goal is an optical bandwidth of 0.5-5 THz with a sensitivity of 40 V/W, a NEP of 4.10-9 W/Hz12/ per pixel and a refresh time of 50 ms.
Keywords :
CMOS image sensors; membranes; silicon compounds; submillimetre wave detectors; thermopiles; 0.5 to 5 THz; 293 to 298 K; 50 ms; SiN; optical bandwidth; refresh time; room temperature; silicon nitride membrane; terahertz detection array; terahertz detector array; thermopile temperature; thin film THz absorber; Biomembranes; Detectors; Optical design; Optical device fabrication; Optical films; Optical sensors; Semiconductor thin films; Sensor arrays; Silicon; Temperature sensors;
Conference_Titel :
Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the 2004 Joint 29th International Conference on
Print_ISBN :
0-7803-8490-3
DOI :
10.1109/ICIMW.2004.1422312
