DocumentCode
434090
Title
Use of modern approaches in automation of measurement of properties of a dielectric layer in MOS-structures
Author
Troyian, P.E. ; Zaitchev, N.G.
fYear
2004
fDate
21-24 Sept. 2004
Firstpage
215
Lastpage
215
Abstract
The problem of a measurement of properties of dielectrics by a method of a capacity devider is considered. Is offered and the method of automation of process of a measurement a volt of performances MAH - structures on the basis of the COMPUTER´is realized.
Keywords
Automation; Crystals; Dielectric measurements; Diodes; Fasteners; Frequency conversion; Gunn devices; Lattices; Microscopy; Ultrasonic variables measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering Proceedings, 2004. APEIE 2004. 2004 7th International Conference on Actual Problems of
Conference_Location
Novosibirsk, Russia
Print_ISBN
0-7803-8476-8
Type
conf
Filename
1427229
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