Title :
Problems of nanosecond laser technologies of film microstructures deposition
Author :
Chesnokov, D.V. ; Chesnokov, V.V. ; Reznikova, E.F.
Abstract :
The interaction of nanosecond laser irradiation with substance in a microtechnological process of forming topological structures on substrates´s surface, especially in laser induced chemical vapor deposition of any materials (nanosecond LCVD)
Keywords :
Chemical lasers; Chemical sensors; Chemical technology; Chemical vapor deposition; Electrons; Inductors; Microstructure; Plasma measurements; Silicon; Surface emitting lasers;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 2004. APEIE 2004. 2004 7th International Conference on Actual Problems of
Conference_Location :
Novosibirsk, Russia
Print_ISBN :
0-7803-8476-8
