Title :
MIMO integral-action anti-windup controller design and applications to temperature control in RTP systems
Author :
Mete, A.N. ; Gunde, A.N.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA
Abstract :
An integral-action controller synthesis is presented, where the controller achieves closed-loop stability and zero steady-state error due to step-input references. Closed-loop stability is maintained even when the integrators in all of the controller channels are limited or completely switched off to protect against integrator windup. The proposed method is applied to temperature control in rapid thermal processing systems, where critical requirements are imposed on tracking of temperature profiles.
Keywords :
MIMO systems; closed loop systems; control nonlinearities; control system synthesis; stability; temperature control; MIMO integral-action anti-windup controller design; closed-loop stability; integrator windup; rapid thermal processing systems; step-input references; temperature control; temperature profile tracking; zero steady-state error; Control system synthesis; Control systems; Error correction; MIMO; Protection; Rapid thermal processing; Stability; Steady-state; Temperature control; Windup;
Conference_Titel :
Decision and Control, 2004. CDC. 43rd IEEE Conference on
Print_ISBN :
0-7803-8682-5
DOI :
10.1109/CDC.2004.1428848
