Lot allocation and process control in semiconductor manufacturing - a dynamic game approach

This paper proposes a framework to study lot allocation (dispatch) policies for improved process control. Minimizing the sensitivity of overall process performance to process and inventory disturbances is proposed as a performance criterion. The specific policy presented considers process performance in making lot allocation decisions, and introduces soft dedication of machines in case of low-running material. Lastly, this policy is non-idling, and is driven by the contents of a buffer controlled by a daily planning system, or a dynamic scheduling algorithm. It is hoped that this paper will lead to additional studies on the interaction between scheduling/dispatch and semiconductor process control, especially in high-mix environments.