Study on high precision angle measuring technology

In recent years, high-precision and high-resolution encoders are expected for a nanotechnology control system. High-precision angle calibration apparatuses are required and hence, they have been developed according to industry expectations. The angle calibration system referred to in this case performs a measurement evaluation of the angle with super-high-precision. The accuracy of the disk and angle sensor was calibrated with high precision using the same accuracy measurement system, and a high-precision angle sensor was achieved. The resolution of the angle calibration system is 0.001 seconds, and its accuracy is 0.01 seconds. Measurement evaluation and compensation of an angle sensor and the disk accuracy was achieved, using the high-precision angle calibration system, and the encoder was realized with a high level of accuracy of 0.2 seconds. The principle by which the angle sensor calibrates the accuracy by itself has been developed. Employing the angle sensor in an environment where there was no previous possibility of using an angle calibration apparatus was found to be highly useful. In addition, a high-resolution angle sensor with 30-bit could be achieved, and the base technology of applying an angle sensor to a nanotechnology system was established.