Effect of nitrogen on the off-state drain leakage current

In this work, a simple approach is applied to a quantitative study of the influence of the oxide charge trapping over the drain extension due to electrical stress on the off-state drain leakage current. It is found that positive charge trapping over the drain extension leads to a significant increase in the off-state drain leakage current if the edges direct tunneling (EDT) is dominant in the drain current. For nitrided gate oxide, with the increase of the nitrogen concentration the increase of the off-state drain leakage current becomes more significant due to the nitrogen-enhanced oxide charge trapping.