DocumentCode
435796
Title
Large scale assembly of carbon nanotube-based integrated circuit structures via "surface-programmed assembly" method
Author
Lee, Minbaek ; Im, Jiwoon ; Myung, Sung ; Hong, Seunghun
Author_Institution
Phys. & Nano Syst. Inst., Seoul Nat. Univ., South Korea
Volume
1
fYear
2004
fDate
18-21 Oct. 2004
Firstpage
615
Abstract
We present a high-precision mass production method for single walled carbon nanotube (SWCNT)-based circuits. In this strategy named "surface-programmed assembly", SWCNTs from the suspension are attracted toward molecular patterns on the substrate and assemble onto specific locations with precise orientations. Significantly, since the method does not rely on any external forces or slow serial patterning techniques, it can be done in a completely parallel manner and is suitable for high-throughput applications. We assembled millions of individual SWCNTs and SWCNT-based circuit structures over ∼ 1cm2 size sample surface in a matter of minutes with a high yield.
Keywords
assembling; carbon nanotubes; integrated circuit manufacture; integrated circuit technology; SWCNT-based circuits; high-precision mass production method; integrated circuit structures; large scale assembly; single walled carbon nanotube; substrate molecular patterns; surface-programmed assembly method; Assembly systems; Atomic force microscopy; Carbon nanotubes; Chemicals; Circuits; Large scale integration; Mass production; Nanostructures; Physics; Soft lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN
0-7803-8511-X
Type
conf
DOI
10.1109/ICSICT.2004.1435081
Filename
1435081
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