DocumentCode
435835
Title
Influence of adsorption-desorption on resonant frequency of micro- and nanocantilevers
Author
Ping, Wang ; Huang, Qing-An ; Hong, Yu
Author_Institution
Key Lab. of MEMS, Southeast Univ., Nanjing, China
Volume
3
fYear
2004
fDate
18-21 Oct. 2004
Firstpage
1751
Abstract
When MEMS is scaled down to nanometers, the surface effects become more and more obvious, among which the influence of adsorption is a main aspect. The paper deals with the problem of the influence of adsorption on resonators in NEMS, based on three basics of adsorption theory. It shows that the change of frequency induced by the adsorption increases with the decrease of cantilever dimensions.
Keywords
adsorption; desorption; micromechanical resonators; nanotechnology; MEMS; adsorption influence; adsorption-desorption; microcantilevers; nanocantilevers; resonant frequency; resonators; surface effects; Electrical capacitance tomography; Equations; Gases; Laboratories; Micromechanical devices; Nanoelectromechanical systems; Nonhomogeneous media; Resonant frequency; Solids; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN
0-7803-8511-X
Type
conf
DOI
10.1109/ICSICT.2004.1435172
Filename
1435172
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