Title :
Study of a novel PZT thin films based micromachined ultrasonic transducer for distance measurement
Author :
Yi Yang ; Tian-Ling Ren ; Yi-Ping Zhu
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
Piezoelectric micromachined ultrasonic transducers (pMUTs) based on PZT-coated membrane structures have been fabricated, packaged and tested. Performance prediction for the resonance frequency is given. Mechanical quality factor, voltage response and directional polar response for the devices have been tested. Due to their small size and low cost, these pMUTs are extraordinary promising in distance measurement, especially used for many miniature measurement systems.
Keywords :
circuit resonance; distance measurement; membranes; micromachining; piezoelectric thin films; piezoelectric transducers; ultrasonic transducers; PZT; PZT thin films; PZT-coated membrane structures; PbZrO3TiO3; directional polar response; distance measurement; mechanical quality factor; micromachined ultrasonic transducer; miniature measurement systems; pMUT; piezoelectric transducers; resonance frequency; voltage response; Biomembranes; Distance measurement; Packaging; Piezoelectric films; Q factor; Resonance; Resonant frequency; Testing; Transistors; Ultrasonic transducers;
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
DOI :
10.1109/ICSICT.2004.1435180
