The research on MEMS fang-bar fluidic angular rate sensor

Author

Yang, Kai ; Zhou, Jian ; Yan, Guizhen

Author_Institution

Inst. of Microelectron., Peking Univ., Beijing, China

Volume

3

fYear

2004

fDate

18-21 Oct. 2004

Firstpage

1808

Abstract

Fluidic angular rate sensors are based on the principle that moving air changes its velocity distribution under the influence of the Coriolis force. However, existing fluidic angular rate sensors are fabricated by traditional machining methods, and are consequently of great volume. Thus, their uses are limited to a great extent. The paper presents a novel micromachined fluidic angular rate sensor, the fang-bar fluidic angular rate sensor, which is fabricated by MEMS technology. Its key components are 4 fang-bar fluidic diodes. The paper theoretically explains the working principle of this sensor in detecting angular rate, and simulates it using finite element analysis software, ANSYS, and finally presents the design of the manufacturing process.

Keywords

angular velocity measurement; flow measurement; fluidic devices; microfluidics; micromachining; microsensors; Coriolis force; MEMS fang-bar fluidic angular rate sensor; fang-bar fluidic diodes; finite element analysis; manufacturing process design; micromachined fluidic angular rate sensor; Analytical models; Diodes; Finite element methods; Fluidic microsystems; Force sensors; Machining; Manufacturing processes; Microfluidics; Micromechanical devices; Paper technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on

Print_ISBN

0-7803-8511-X

Type

conf

DOI

10.1109/ICSICT.2004.1435185

Filename

1435185