DocumentCode
435890
Title
Silicon nanocrystal memories
Author
Shi, Y. ; Yang, H.G. ; Lv, J. ; Pu, L. ; Zhang, R. ; Shen, B. ; Zheng, Y.D.
Author_Institution
Dept. of Phys., Nanjing Univ., China
Volume
2
fYear
2004
fDate
18-21 Oct. 2004
Firstpage
881
Abstract
In this paper, we firstly present an overview of silicon nanocrystal memories. The performance and fabrication characteristics of the hetero-nanocrystal memories are mainly studied. These devices demonstrate high promising potential as candidates for future deep-submicron embedded memories.
Keywords
elemental semiconductors; nanoelectronics; semiconductor storage; silicon; Si; deep-submicron embedded memory; fabrication characteristics; hetero-nanocrystal memory; silicon nanocrystal memory; Fabrication; Low voltage; MOSFET circuits; Nanocrystals; Nonvolatile memory; Physics; Random access memory; Silicon; Tunneling; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN
0-7803-8511-X
Type
conf
DOI
10.1109/ICSICT.2004.1436647
Filename
1436647
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