Dynamic analysis of a 3-DOF flexure parallel micromanipulator

This paper presents an analytical approach for dynamic modeling of a three-degree-of-freedom flexure parallel micromanipulator based on the pseudo rigid-body model approach. The motion equation is established using Lagrangian method. The dynamic characteristics such as natural frequencies and transient responses are also investigated. The modeling using analytical approach is proved to be accurate through a validation based on a finite element analysis. The dynamic analysis has also proved that the micromanipulator in this study possesses high natural frequencies and decoupled dynamics.