DocumentCode
436430
Title
Hierarchical Petri net model and its application for scheduling of semiconductor production line
Author
Fei Qiao ; Li Li ; Zuntong Wang ; Qidi Wu
Author_Institution
CIMS Research Center, Tongji University, China
Volume
18
fYear
2004
fDate
June 28 2004-July 1 2004
Firstpage
347
Lastpage
352
Abstract
In this paper 3 kind of colored Petri net based hierarchical scheduling model is proposed by introducing multi-dimension color sets and machine group oriented hierarchy. Then, the modeling approach, which consists of top-down structure modeling and bottom-up parameter definition, is discussed. At last, a case study of the proposed model as well as its modeling approach are illustrated within example semiconductor production fine.
Keywords
Computer integrated manufacturing; Flexible manufacturing systems; Job shop scheduling; Manufacturing processes; Petri nets; Production systems; Semiconductor device manufacture; Semiconductor process modeling; Uncertainty; Petri net; modeling; scheduling; semiconductor production;
fLanguage
English
Publisher
ieee
Conference_Titel
Automation Congress, 2004. Proceedings. World
Conference_Location
Seville
Print_ISBN
1-889335-21-5
Type
conf
Filename
1441065
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