DocumentCode

436748

Title

The simulation of damage tracks in silicon

Author

Messenger, Scott R. ; Burke, Edward A. ; Xapsos, Michael A. ; Summers, Geoff P. ; Walters, Robert J.

fYear

2003

fDate

15-19 Sept. 2003

Firstpage

363

Lastpage

367

Keywords

Analytical models; Cosmic rays; Energy loss; Equations; Ion implantation; Laboratories; Monte Carlo methods; Particle tracking; Silicon; Target tracking;

fLanguage

English

Publisher

ieee

Conference_Titel

Radiation and Its Effects on Components and Systems, 2003. RADECS 2003. Proceedings of the 7th European Conference on

Conference_Location

Noordwijk, The Netherlands

ISSN

0379-6566

Print_ISBN

92-9092-846-8

Type

conf

Filename

1442481