Title :
In-situ scanning tunneling microscopy observation of InAs quantum dots on GaAs(001) during molecular beam epitaxy growth
Author :
Tsukamoto, Shiro ; Bell, Gavin R. ; Arakawa, Yasuhiko
Author_Institution :
Nanoelectronics Collaborative Res. Center, Tokyo Univ., Japan
fDate :
31 May-4 June 2004
Abstract :
Scanning tunneling microscopy (STM) has proved to be an invaluable tool for probing epitaxial growth phenomena in general, and has been successfully applied to many GaAs-based materials grown by molecular beam epitaxy (MBE). Typical STM-MBE experiments involve quenching the sample and transferring it to a remote STM chamber under arsenic-free ultra-high vacuum (UHV). In the case of GaAs-based materials grown at substrate temperatures of 400-600 °C, operating the STM at room temperature ensures that the surface is essentially static on the time scale of STM imaging. To attempt dynamic experiments requires a system in which STM and MBE were incorporated into one unit rather than in separate chambers in order to scan in situ during growth. In this paper, we discussed the observation on the heteroepitaxial growth of InAs on GaAs(001) by this system along with prospects for key in situ STM experiments.
Keywords :
III-V semiconductors; indium compounds; molecular beam epitaxial growth; quenching (thermal); scanning tunnelling microscopy; semiconductor growth; semiconductor quantum dots; 400 to 600 degC; InAs-GaAs; MBE; STM; arsenic-free ultra-high vacuum; epitaxial growth phenomena; heteroepitaxial growth; molecular beam epitaxy growth; quantum dots; quenching; scanning tunneling microscopy; Gallium arsenide; Image reconstruction; Microscopy; Molecular beam epitaxial growth; Quantum dots; Surface morphology; Surface reconstruction; Temperature; Tunneling; US Department of Transportation;
Conference_Titel :
Indium Phosphide and Related Materials, 2004. 16th IPRM. 2004 International Conference on
Print_ISBN :
0-7803-8595-0
DOI :
10.1109/ICIPRM.2004.1442613