DocumentCode

437198

Title

MEMS Microphone Technology

Author

Brunson, Kevin M. ; Jones, A.R.D. ; Combes, D.J. ; Davies, R.R. ; King, D.O.

fYear

2005

fDate

38467

Firstpage

42461

Lastpage

42469

fLanguage

English

Publisher

iet

Conference_Titel

MEMS Sensor Technologies, 2005. The IEE Seminar and Exhibition on

Conference_Location

IET

ISSN

0537-9989

Print_ISBN

0-86341-523-7

Type

conf

Filename

1453357