Title :
Selective stiction based vertical comb actuators
Author :
Kim, Jongbaeg ; Christensen, Dane ; Lin, Liwei
fDate :
30 Jan.-3 Feb. 2005
Keywords :
Actuators; Etching; Fabrication; Hafnium; Inspection; Microstructure; Mirrors; Process design; Springs; Stators;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453952
