DocumentCode
437228
Title
Determining the strength of micro-beams without measuring forces or displacements
Author
Elata, David ; Hirshberg, Amon ; Naftali, Matan
Author_Institution
Technion, Israel Inst. of Technol., Haifa, Israel
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
435
Lastpage
438
Abstract
It is demonstrated that the strength of brittle micro-beams can be measured without measuring any forces or displacements. A novel test device is presented in which the strength of brittle beams is directly deduced from their size after failure.
Keywords
beams (structures); failure (mechanical); mechanical strength; mechanical testing; micromechanical devices; test equipment; brittle micro beams; micro-beam strength; Conductors; Current measurement; Displacement measurement; Force measurement; Ligaments; Mechanical factors; Microelectromechanical devices; Stress; Surface texture; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1453960
Filename
1453960
Link To Document